Hou Shuting

Yunting graphene Chip Interconnection and Displacement Sensing System

Graphene-based chip interconnect materials, characterized by their compact size, ultra-low resistivity, and high thermal stability, help overcome computational bottlenecks in 5G communications and AI chips. Graphene capacitive displacement sensors are being used in industrial applications—such as semiconductor equipment and precision machine tools—to replace imported products, thereby breaking foreign technological monopolies. 

1. Graphene is compatible with standard lithography processes; it can be fabricated into self-supporting thin films or beam structures at the atomic scale. As an interconnect conductor, graphene's cross-sectional area is 10⁻³ times smaller than that of copper, enabling interconnect and via dimensions to be maintained within the range of approximately 5–10 nm. By adjusting the angle between two graphene layers, the electric field can be altered, causing the bilayer graphene to transition into a superconductor. The British academic journal Nature published two consecutive articles detailing a groundbreaking discovery by Cao Yuan, a student from the USTC Young Talent Program, regarding graphene superconductivity: when two layers of parallel graphene are stacked at a subtle angle of approximately 1.08°, a superconducting effect is induced. This achievement is hailed as the "fifth great invention" in the world. 

2. The electron mobility of graphene (up to 2×10⁵ cm²/V·s) is significantly higher than that of copper (approximately 0.003 cm²/V·s), which can substantially reduce resistance and signal delay, making it ideal for high-frequency, high-density integrated circuits. Thermal management breakthrough: The thermal conductivity of graphene (5000 W/m·K) is more than 10 times greater than that of copper, enabling the resolution of thermal management challenges in chips fabricated using processes below 3 nm, thereby extending device lifespan and improving reliability. Beam structure: This enables the formation of self-supporting thin films or beam structures at the atomic scale. The nanoscale thickness of graphene helps mitigate edge effects and enhances the accuracy of surface roughness measurement and thin-film thickness determination. Graphene-based piezoresistive sensors can now detect surface fluctuations at the single-atom level, providing critical data for quantum computing research. The multi-parameter response characteristics of graphene enable the simultaneous monitoring of displacement and other physical quantities, allowing for the real-time generation of 3D pressure distribution maps of object surfaces and facilitating slip-free robotic grasping.